Single-Atom Doping for Quantum Device Development in Diamond and Silicon

C. D. Weis, A. Schuh, A. Batra, A. Persaud, I. W. Rangelow, J. Bokor, C. C. Lo, S. Cabrini, E. Sideras-Haddad, G. D. Fuchs, R. Hanson, D. D. Awschalom, and T. Schenkel, “Single-Atom Doping for Quantum Device Development in Diamond and Silicon,” J. Vac. Sci. Tech. B 26, 2596 (2008).