Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond

D. M. Toyli, C. D. Weis, G. D. Fuchs, T. Schenkel, and D. D. Awschalom, “Chip-Scale Nanofabrication of Single Spins and Spin Arrays in Diamond,” Nano Lett. 10, 3168 (2010).